LIACS Thesis Repository
These webpages contain theses and reports by students affiliated with the various bachelor and master programmes offered at the Leiden Institute of Advanced Computer Science
(LIACS),
the computer science and artificial intelligence department of Leiden University.
The following thesis was written by a student who graduated in 2021-2022 from the Master Computer Science programme at Leiden University.
Thesis details
| Title | Pattern Mining Enabled Scanner Event-based Quantitative Analysis of Lithography Scanner Productivity Performance |
| Student | Liu, C. |
| Programme | Master Computer Science |
| Year | 2021-2022 |
| Supervisors | Leeuwen, prof.dr. M. (Matthijs) van Kowalczyk, dr. W.J. (Wojtek) |
| Thesis | Open Thesis PDF |
Citation details
Liu, C., Pattern Mining Enabled Scanner Event-based Quantitative Analysis of Lithography Scanner Productivity Performance, Thesis Master Computer Science, LIACS, Leiden University, 2022.