Master Computer Science



The following thesis was written by a student in the 2021-2022 class of the Master Computer Science programme at Leiden University.


Thesis details

TitlePattern Mining Enabled Scanner Event-based Quantitative Analysis of Lithography Scanner Productivity Performance
StudentLiu, C.
ProgrammeMaster Computer Science
Year2021-2022
SupervisorsLeeuwen, dr. M. (Matthijs) van
Kowalczyk, dr. W.J. (Wojtek)
Thesis Open Thesis PDF

Citation details

Liu, C., Pattern Mining Enabled Scanner Event-based Quantitative Analysis of Lithography Scanner Productivity Performance, Thesis Master Computer Science, LIACS, Leiden University, 2022.